THREE OMEGA TECHNIQUE TO MEASURE THERMAL DIFFUSIVITY OF THIN FILM MATERIALS

Joshua T. Hargraves and David T. Marx*

Illinois State University, Physics Department, Normal, IL 61761

marx@phy.ilstu.edu


Abstract

While many methods, such as flash diffusivity, are useful in measuring the thermal diffusivity of bulk materials, such practices fall short in their capability to measure thin films. However, the 3 omega technique, developed by D.G. Cahill and R.O. Pohl in 1987, has recently resurfaced as an ideal method for measuring such thin films. Today it is being used at Illinois State University in measuring the properties of semiconductor thermoelectric superlattices.

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